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Extreme ultraviolet transmission grating monochromator
Applied Optics
|March 25, 2010
Abstract:
A compact monochromator has been designed to utilize recently developed free-standing XUV transmission gratings. Tests using a condensed spark source of far UV radiation show that this monochromator, with 20-microm slits, is capable of 0.08-nm resolution at 30 nm in the first order. A physical description of the system and test results are presented.
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