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Updated: Jun 14, 2026

Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting
Published on: January 23, 2013
Thin films of conductive ZnO patterned by micromolding resulting in nearly isolated features
Ole F Göbel1, Dave H A Blank, Johan E ten Elshof
1Mesa+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands.
Abstract:
Patterned and continuous thin films of conductive Al-doped zinc oxide (ZnO:Al) were prepared on different substrates from a polymeric precursor solution. Their electric conductivity and light transmittance (for visible and UV light) was measured at room temperature. By means of a simple device, conductive ZnO:Al films with high fidelity patterns with features of 2-20 microm width could be obtained by simply micromolding the liquid precursor film prior to heat treatment. The individual features were interconnected by a very thin residual ZnO layer.

