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Updated: Jun 14, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
Optical microbubble resonator
M Sumetsky1, Y Dulashko, R S Windeler
1OFS Laboratories, 19 Schoolhouse Road, Somerset, New Jersey 08873, USA. sumetski@ofsoptics.com
Abstract:
We develop a method for fabricating very small silica microbubbles having a micrometer-order wall thickness and demonstrate the first optical microbubble resonator. Our method is based on blowing a microbubble using stable radiative CO(2) laser heating rather than unstable convective heating in a flame or furnace. Microbubbles are created along a microcapillary and are naturally opened to the input and output microfluidic or gas channels. The demonstrated microbubble resonator has 370 microm diameter, 2 microm wall thickness, and a Q factor exceeding 10(6).
