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Updated: Jun 14, 2026

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
Published on: June 9, 2023
Charged oxygen defects in SiO2: going beyond local and semilocal approximations to density functional theory
L Martin-Samos1, G Roma, P Rinke
1CNR-IFNM Democritos and Sissa, Trieste, Italy.
Abstract:
The long-standing problem of the oxygen self-diffusion mechanism in silicon dioxide, a prototypical oxide, both in the crystalline and in the amorphous phase, is studied from first principles. We demonstrate that the widely used local-density approximation to density functional theory (DFT) predicts a kinetic behavior of oxygen in strong disagreement with available experiments. Applying a recently developed scheme that combines DFT with quasiparticle energy calculations in the G0W0 approximation considerably improves defect energetics and gives gratifying agreement with experiment.
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