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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

Published on: December 21, 2015

Influence of phase transformation on stress evolution during growth of metal thin films on silicon

A Fillon1, G Abadias, A Michel

  • 1Institut P', CNRS-Université de Poitiers-ENSMA, Département Physique et Mécanique des Matériaux, SP2MI-Téléport 2, F86962 Futuroscope-Chasseneuil cedex, France.

Physical Review Letters
|April 7, 2010
PubMed

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