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Scanning Electron Microscopy

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Transmission Electron Microscopy

Transmission Electron Microscopy

In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400 keV in...

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Related Experiment Video

Updated: Jun 14, 2026

Elemental-sensitive Detection of the Chemistry in Batteries through Soft X-ray Absorption Spectroscopy and Resonant Inelastic X-ray Scattering

Elemental-sensitive Detection of the Chemistry in Batteries through Soft X-ray Absorption Spectroscopy and Resonant Inelastic X-ray Scattering

Published on: April 17, 2018

Surface sensitivity in scanning transmission x-ray microspectroscopy using secondary electron detection.

C Hub¹, S Wenzel, J Raabe

¹Physikalische Chemie II and ICMM, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany.

The Review of Scientific Instruments

|April 8, 2010

Summary

This study integrates electron detection into scanning transmission x-ray microspectroscopy (STXM), enhancing surface sensitivity. This advancement allows for detailed surface analysis previously unavailable with bulk-sensitive x-ray detection methods.

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Last Updated: Jun 14, 2026

Elemental-sensitive Detection of the Chemistry in Batteries through Soft X-ray Absorption Spectroscopy and Resonant Inelastic X-ray Scattering

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Area of Science:

Materials Science
Spectroscopy
Surface Science

Background:

Scanning transmission x-ray microspectroscopy (STXM) traditionally offers bulk sensitivity.
High lateral resolution is a key feature of STXM.
Limitations exist in probing sample surfaces with conventional x-ray detection.

Purpose of the Study:

To demonstrate the successful integration of electron detection into an STXM.
To enhance the surface sensitivity of STXM.
To enable detailed surface analysis using secondary electron detection.

Main Methods:

Implementation of a channeltron electron multiplier for electron detection.
Utilizing resonant excitation for secondary electron emission.
Developing correction schemes for self-absorption in thicker specimens.

Main Results:

Successful integration of electron detection into STXM.
Achieved enhanced surface sensitivity by detecting secondary electrons.
Established methods to correct for self-absorption artifacts.

Conclusions:

Electron detection significantly expands STXM capabilities.
The enhanced STXM provides a powerful tool for surface-sensitive analysis.
The developed methods are crucial for accurate characterization of materials.