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Updated: Jun 14, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
A compact, passive setup for low vibration noise measurements in the frequency band (300-2000) Hz
Mario Saraceni1, Michele Bonaldi, Lorenzo Castellani
1INFN, Sezione di Padova, Via Marzolo 8, I-35131 Padova, Italy.
Abstract:
In this paper we report about the setup we designed to isolate at about 1.5 kHz from mechanical noise an experimental payload of about 6.6 kg mass. We discuss the design guidelines and optimization by finite element analysis and we characterize the suspension performance by experimental measurements. While providing an attenuation of about 180 dB in all spatial directions at 1.5 kHz, our passive system is very compact and can be easily replicated whenever the need of a volume of few liters with very low vibration noise level in the 1-2 kHz range is needed.
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