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Updated: Jun 14, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
07:47

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography

Published on: February 12, 2017

Reduction of modal noise by using reduced spot excitation

J Saijonmaa, S J Halme

    Applied Optics
    |April 8, 2010
    PubMed

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