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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

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Pillar-array based optical sensor.

Tao Xu¹, Ning Zhu, Michelle Y-C Xu

¹Department of Electrical and Computer Engineering, University of Toronto.

|April 15, 2010

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A novel silicon/silicon dioxide optical microcavity sensor achieved a high quality factor of 27,600. This microcavity demonstrated a 3.5 nm wavelength shift for a 0.01 refractive index change, showing promise for sensing applications.

Area of Science:

Photonics and optical engineering
Materials science
Nanotechnology

Background:

Optical microcavities are crucial for various photonic applications.
Silicon/silicon dioxide (Si/SiO2) material systems offer compatibility with existing semiconductor fabrication processes.
High-quality factor (Q-factor) microcavities are essential for sensitive detection.

Purpose of the Study:

To fabricate and characterize an optical microcavity sensor in a Si/SiO2 material system.
To evaluate the sensing performance of the microcavity for refractive index changes.
To investigate the effect of pillar aspect ratios on cavity performance.

Main Methods:

Fabrication of an optical microcavity using pillar arrays in a Si/SiO2 system.

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Transmission measurements to determine the quality factor (Q-factor) of the microcavity.

Sensing experiments involving immersion in optical fluids with varying refractive indices to measure resonance peak shifts.

Main Results:

Achieved a high quality factor of 27,600 for the fabricated optical microcavity.
Observed a resonance peak wavelength shift of 3.5 nm for a refractive index change of 0.01.
Compared the performance of microcavities with different pillar aspect ratios.

Conclusions:

The fabricated Si/SiO2 optical microcavity demonstrates excellent performance with a high Q-factor.
The microcavity exhibits high sensitivity to refractive index changes, suitable for sensing applications.
Pillar aspect ratio is a critical parameter influencing the performance of optical microcavities.