Pillar-array based optical sensor
Related Experiment Video
Updated: Jun 13, 2026
Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Tao Xu1, Ning Zhu, Michelle Y-C Xu
1Department of Electrical and Computer Engineering, University of Toronto.
Abstract:
An optical microcavity based on pillar arrays has been fabricated in Si/SiO(2) material system. Transmission measurement was taken and a quality factor as high as 27,600 was observed. This cavity was tested for sensing applications by immersing into optical fluids with accurate refractive indices. For refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. We also compare cavities consisting of pillars with different aspect ratios.
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