Related Experiment Video
Updated: Jun 13, 2026

10:28
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Open-loop control demonstration of micro-electro-mechanical-system MEMS deformable mirror.
Célia Blain1, Rodolphe Conan, Colin Bradley
1University of Victoria, Department of Mechanical Engineering, PO Box 3055, Stn. CSC,Victoria, BC, V8W 3P6, Canada. cblain@me.uvic.ca
Optics Express
|April 15, 2010
Summary
This study characterizes Micro-Electro-Mechanical-System (MEMS) deformable mirrors (DMs) for open-loop adaptive optics (AO) control. A simpler influence function additivity approach achieved an 11% residual DM error, advancing AO technology for astronomy.
Area of Science:
- Astronomy and Astrophysics
- Optical Engineering
- Instrumentation Science
Background:
- Advanced astronomical observations require sophisticated adaptive optics (AO) systems.
- Micro-Electro-Mechanical-System (MEMS) deformable mirrors (DMs) are crucial for Multi-Object AO (MOAO) and Extreme AO (ExAO) but face control challenges.
- Current research focuses on modeling MEMS DMs for open-loop control, a key barrier for MOAO implementation.
Purpose of the Study:
- To develop and validate a computationally efficient open-loop control strategy for MEMS DMs.
- To characterize MEMS DMs for improved performance in AO systems.
- To reduce reliance on complex modeling techniques like plate equations.
Main Methods:
- Performed a thorough characterization of a MEMS DM.
- Calibrated the actuator stroke-voltage relationship and actuator influence functions.
- Employed a simpler control approach based on the additivity of influence functions, avoiding heavy modeling.
Main Results:
- Achieved a mean residual open-loop root-mean-square (rms) error of 16.5 nm.
- Obtained a mean fitting error rms of 13.3 nm.
- The mean DM error rms was 10.8 nm, representing 11% of the residual error, demonstrating the model's performance.
Conclusions:
- The developed open-loop control strategy using influence function additivity is effective for MEMS DMs.
- This approach offers a simpler alternative to complex modeling for AO systems.
- The results show promise for the on-sky demonstration of MEMS DMs in future AO systems.
More Related Videos
Related Concept Videos
Open and closed-loop control systems
Control systems are foundational elements in automation and engineering. They are broadly categorized into open-loop and closed-loop systems. These classifications hinge on the presence or absence of feedback mechanisms, significantly influencing the system's performance, complexity, and application.
An open-loop control system operates without feedback from the output. It consists of two primary elements: the controller and the controlled process. The controller receives an input signal and...
An open-loop control system operates without feedback from the output. It consists of two primary elements: the controller and the controlled process. The controller receives an input signal and...
Feedback control systems
Feedback control systems are categorized in various ways based on their design, analysis, and signal types.
Linear feedback systems are theoretical models that simplify analysis and design. These systems operate under the principle that their output is directly proportional to their input within certain ranges. For instance, an amplifier in a control system behaves linearly as long as the input signal remains within a specific range. However, most physical systems exhibit inherent nonlinearity...
Linear feedback systems are theoretical models that simplify analysis and design. These systems operate under the principle that their output is directly proportional to their input within certain ranges. For instance, an amplifier in a control system behaves linearly as long as the input signal remains within a specific range. However, most physical systems exhibit inherent nonlinearity...

