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Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
12:38

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

Published on: December 16, 2011

Oxidized silicon-on-insulator (OxSOI) from bulk silicon: a new photonic platform

Nicolás Sherwood-Droz1, Alexander Gondarenko, Michal Lipson

  • 1School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA. nrs35@cornell.edu

Optics Express
|April 15, 2010
PubMed

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