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Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
Published on: July 17, 2020
Surface and bulk absorption in germanium at 10.6 microm.
Applied Optics
|April 15, 2010
Summary
Surface and bulk optical absorption in germanium (Ge) were measured. Polishing with colloidal silica significantly reduced surface absorption, and the optimal resistivity for low bulk absorption is 10-40 Ω-cm.
Area of Science:
- Materials Science
- Optical Engineering
- Solid State Physics
Background:
- Germanium (Ge) is a critical semiconductor material with applications in optics and electronics.
- Understanding optical absorption is crucial for optimizing Ge-based device performance.
- Surface conditions significantly impact the optical properties of semiconductor materials.
Purpose of the Study:
- To quantify the surface and bulk optical absorption of germanium at 10.6 μm.
- To investigate the influence of resistivity and surface preparation on optical absorption.
- To determine the optimal resistivity range for minimizing bulk absorption in germanium.
Main Methods:
- Adiabatic laser calorimetry was employed to measure optical absorption.
- Experiments were conducted on germanium samples with varying resistivity and surface treatments.
- Surface preparation methods included conventional optical polishing (Linde, Al2O3), colloidal silica (Syton) polishing, and single-point diamond machining.
Main Results:
- Conventional polishing resulted in surface absorption contributing up to 50% of total absorption.
- Colloidal silica polishing reduced surface absorption to less than 10%.
- The optimal resistivity range for low bulk optical absorption in germanium at room temperature is 10-40 Ω-cm.
- Single-point diamond machining sometimes yielded lower surface absorption than colloidal silica polishing.
Conclusions:
- Surface preparation is a critical factor in minimizing optical absorption in germanium.
- Colloidal silica polishing offers a significant improvement over conventional methods for reducing surface absorption.
- Resistivity plays a key role in bulk optical absorption, with an optimal range identified for germanium.

