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Reflection-transmission phase shift: interferometer and viewing optics.

J A Monjes1, B W Weinstein, D L Willenborg

  • 1University of California, Lawrence Livermore National Laboratory, P.O. Box 5508, Livermore, California 94550, USA.

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Summary
This summary is machine-generated.

This study details an automated surface mapping system for precise spherical shell analysis. The system achieves 10 nm accuracy in characterizing surface topography and wall thickness uniformity.

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Area of Science:

  • Optical metrology
  • Surface characterization
  • Materials science

Background:

  • Accurate characterization of spherical shells is crucial for various applications.
  • Existing methods may lack the required precision for surface finish and wall thickness analysis.
  • Opaque and transparent shells present unique challenges in metrology.

Purpose of the Study:

  • To describe the optical components of an automated surface mapping system.
  • To enable high-accuracy characterization of surface topography and wall thickness uniformity of spherical shells.
  • To achieve 10 nm accuracy and 1 microm resolution in measurements.

Main Methods:

  • Utilizes an interferometer and viewing optics as key components.
  • Employs an automated surface mapping system.
  • Measures the differential phase shift between two orthogonally polarized beams before and after interaction with the test object.

Main Results:

  • The system is designed for characterizing both opaque and transparent spherical shells.
  • Achieves high accuracy (10 nm) and resolution (1 microm) in surface and thickness measurements.
  • The differential phase shift method provides a robust means for metrology.

Conclusions:

  • The described system offers a precise method for spherical shell metrology.
  • The automated approach enhances efficiency and accuracy in surface and wall thickness analysis.
  • This technique is applicable to a wide range of spherical shell materials and types.