Lutetium Oxide Coatings by PVD

Due to its high density and cubic structure, Lutetium oxide (Lu(2)O(3)) has been extensively researched for scintillating applications. Present manufacturing methods, such as hot pressing and sintering, do not provide adequate resolution due to light scattering of polycrystalline materials. Vapor deposition has been investigated as an alternative manufacturing method. Lutetium oxide transparent optical coatings by magnetron sputtering offer a means of tailoring the coating for optimum scintillation and resolution. Sputter deposited coatings typically have inherent stress and defects that adversely affect transparency and emission. The effect of process parameters on the coating properties is being investigated via x-ray diffraction (XRD), scanning electron microscopy (SEM) and emission spectroscopy, and will be presented and discussed.