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Updated: Jun 13, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Daniel Malacara-Doblado1, Zacarias Malacara-Hernández, Armando Gómez-Vieyra
1Centro de Investigaciones en Optica, A. C., Loma del Bosque 115, León Gto. México 37150. dmalacdo@cio.mx
This study introduces a new geometric approximation method for determining wavefront aberrations from defocused images or Hartmanngrams. This approach avoids complex diffraction theory and transversal aberration integration for primary aberration retrieval.
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