You might also read
Articles linked to this work by shared authors, journal, and citation graph.
1Veeco Instruments Inc., 2650 E. Elvira Road, Tucson, Arizona 85706, USA. fmunteanu@veeco.com
Lateral scanning white-light interferometry offers continuous large sample scanning. A new self-calibration method eliminates manual tilt angle calibration, improving industrial adoption for optical metrology.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: