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Aberration-induced intensity imbalance of alternating phase-shifting mask in lithographic imaging

Bo Peng1, Xiangzhao Wang, Zicheng Qiu

  • 1Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.

Optics Letters
|May 4, 2010
PubMed

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In-phase-contrast microscopes, interference between light directly passing through a cell and light refracted by cellular components is used to create high-contrast, high-resolution images without staining. It is the oldest and simplest type of microscope that creates an image by altering the wavelengths of light rays passing through the specimen. Altered wavelength paths are created using an annular stop in the condenser. The annular stop produces a hollow cone of...