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Updated: Jun 13, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

MEMS-based high speed scanning probe microscopy.

E C M Disseldorp¹, F C Tabak, A J Katan

¹Leiden University, Niels Bohrweg 2, 2333 CA Leiden, The Netherlands.

The Review of Scientific Instruments

|May 6, 2010

Summary

This summary is machine-generated.

Microelectromechanical systems (MEMS) z-scanners significantly boost scanning probe microscope (SPM) speed. This advancement enables faster imaging of dynamic processes on rough surfaces, opening new research avenues.

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Area of Science:

Materials Science
Nanotechnology
Mechanical Engineering

Background:

Scanning probe microscopy (SPM) is crucial for nanoscale imaging.
Conventional SPM systems face limitations in scanning speed, hindering the observation of dynamic processes.
Out-of-plane scanning motion is a key factor limiting SPM performance.

Purpose of the Study:

To investigate the integration of microelectromechanical systems (MEMS) z-scanners for enhanced SPM speed.
To evaluate the performance of MEMS z-scanners in atomic force microscopy (AFM) and scanning tunneling microscopy (STM) modes.
To demonstrate the capability of MEMS-enhanced SPM for imaging dynamic processes on rough surfaces.

Main Methods:

Experimental implementation of MEMS z-scanners with a 189 kHz fundamental resonance frequency.
Operation of the SPM in both AFM and STM configurations utilizing the MEMS z-scanner.
Testing on surfaces with significant roughness to assess performance under challenging conditions.

Main Results:

Achieved lateral tip speeds of 5 mm/s with full feedback control.
Demonstrated successful high-speed scanning on rough surfaces, overcoming previous limitations.
Confirmed the viability of MEMS z-scanners for high-performance SPM applications.

Conclusions:

MEMS z-scanners offer a substantial improvement in SPM high-speed performance.
The enhanced scan speed facilitates the observation of dynamic nanoscale phenomena.
Future development of even higher frequency MEMS scanners promises further advancements in SPM capabilities.