Control and data acquisition software for high-density CMOS-based microprobe arrays implementing electronic depth

Karsten Seidl1, Tom Torfs, Patrick A De Mazière

  • 1Department of Microsystems Engineering (IMTEK), Microsystem Materials Laboratory, University of Freiburg, Georges-Koehler-Allee 103, Freiburg, Germany. seidl@imtek.de

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