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Updated: Jun 13, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Abstract:
Fabry-Perot spectral output is a convolution between the input spectrum and the response function of the Fabry-Perot spectroscopic instrument. We have developed a deconvolution algorithm, where we do not specify the functional forms to the output spectrum and the instrumental response function but use only numerical data as observed. Merits of our algorithm include: the divergence problem is avoided by iterative methods treating data components in the order of their magnitudes; background and delta function type elastic components are treated automatically as part of the built-in signal; and very low level signals can be retrieved from the strong background.
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