Antireflection effect in ultrahigh spatial-frequency holographic relief gratings

An interpretation model for low reflectivity in ultrahigh spatial-frequency holographic relief gratings is proposed. The model is based on the concept that the grating effective index, caused by grating ultrahigh spatial frequency, is graded in the depth direction and forms an antireflective constitution similar to the multilayer coating. Numerical results show that a sinusoidal grating is antireflective over wide groove depth, wavelength and incident angle ranges, and a grating with nearly triangular section, having a circle arc index distribution, has a very low reflectivity, >10(-4)%. Reflectivity vs groove depth, obtained experimentally for a holographically recorded photoresist grating, agrees fairly well with the numerical results.