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Related Concept Videos

Atomic Force Microscopy01:08

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

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Related Experiment Video

Updated: Jun 13, 2026

Experiments on Ultrasonic Lubrication Using a Piezoelectrically-assisted Tribometer and Optical Profilometer
09:21

Experiments on Ultrasonic Lubrication Using a Piezoelectrically-assisted Tribometer and Optical Profilometer

Published on: September 28, 2015

Ultrahigh accuracy 3-D profilometer.

K Yoshizumi, T Murao, J Masui

    Applied Optics
    |May 11, 2010
    PubMed
    Summary
    This summary is machine-generated.

    A new 3-D profilometer achieves ultrahigh accuracy for measuring aspheric lens profiles using laser heterodyne interferometry. This advanced instrument provides precise rectangular and polar coordinate measurements for optical surface analysis.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Surface Science

    Background:

    • Accurate measurement of aspheric surfaces is critical for high-performance optics.
    • Existing profilometry techniques may lack the required accuracy or versatility for complex shapes.
    • Laser heterodyne interferometry offers high precision for surface characterization.

    Purpose of the Study:

    • To develop and validate an ultrahigh accuracy 3-D profilometer for aspheric lenses and molds.
    • To enable both rectangular and polar coordinate measurements of surface profiles.
    • To assess the instrument's accuracy across various surface inclinations and dynamic ranges.

    Main Methods:

    • Development of a 3-D profilometer based on laser heterodyne interferometry.
    • Measurement of surface profiles of aspheric lenses and their corresponding molds.
    • Characterization of measurement accuracy for X-Y-Z axes and polar coordinates.

    Main Results:

    • Achieved measuring accuracy of 0.01-0.05 micrometers for X-Y-Z axes with surface inclination < +/-25 degrees.
    • Polar coordinate measurement accuracy better than 0.05 micrometers for surface inclination < +/-55 degrees.
    • Established a dynamic measurement range of 40 x 40 x 20 mm for X-Y-Z axes.

    Conclusions:

    • The developed laser heterodyne interferometer-based 3-D profilometer provides ultrahigh accuracy for aspheric surface metrology.
    • The instrument is capable of precise rectangular and polar coordinate measurements, crucial for optical component manufacturing.
    • Demonstrated high accuracy and a significant dynamic range, making it suitable for advanced optical applications.