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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Doppler phase-shifting digital holography and its application to surface shape measurement
Yuichi Kikuchi1, Daisuke Barada, Tomohiro Kiire
1Center for Optical Research and Education (CORE), Utsunomiya University, Yoto 7-1-2,Utsunomiya, Tochigi 321-8585, Japan.
Optics Letters
|May 19, 2010
Summary
Digital holography uses the optical Doppler effect and a high-speed camera to record interference fringes. This method accurately measures surface shapes, even in disturbed environments.
Area of Science:
- Optics and Photonics
- Metrology
Background:
- Digital holography is a powerful technique for 3D imaging.
- Measuring surface shapes in dynamic or disturbed environments presents significant challenges.
Purpose of the Study:
- To propose and demonstrate a novel digital holography method.
- To measure the surface shape of an object under disturbed environmental conditions.
Main Methods:
- Utilizing the optical Doppler effect for fringe analysis.
- Recording time-varying interference fringes with a high-speed CMOS camera.
- Extracting complex amplitude via time-domain Fourier transform.
Main Results:
- Successfully extracted complex amplitude from recorded fringes.
- Accurately measured the surface shape of a concave mirror.
- Demonstrated robustness in a disturbed environment.
Conclusions:
- The proposed digital holography method is effective for surface shape measurement.
- The optical Doppler effect approach enhances measurement accuracy in challenging conditions.
