Miniature surface-mountable Fabry-Perot pressure sensor constructed with a 45 degrees angled fiber

Area of Science:

• Optoelectronics
• Materials Science
• Sensor Technology

Background:

• Traditional pressure sensors often face limitations in miniaturization and integration for specific applications.
• Developing robust, compact sensors for precise fluid pressure monitoring is crucial across various scientific and industrial fields.

Purpose of the Study:

• To present a novel surface-mountable miniature Fabry-Perot (FP) pressure sensor.
• To demonstrate a unique optical configuration utilizing total internal reflection within a fiber optic waveguide.
• To characterize the performance of the developed sensor for static pressure measurements.

Main Methods:

• Fabrication of a Fabry-Perot cavity on the sidewall of an optical fiber using photolithography.
• Integration of a polymer-metal composite diaphragm as the pressure transducer.
• Utilizing total internal reflection at an angled fiber end face to achieve 90-degree optical axis steering.

Main Results:

• The sensor demonstrated good linearity over a pressure range of 1.9-14.2 psi.
• Achieved a sensitivity of 0.009 microm/psi.
• Exhibited a hysteresis of 2.7%.

Conclusions:

• The developed miniature FP pressure sensor offers a reliable solution for static fluid pressure measurements.
• The unique fiber-optic based design enables compact and surface-mountable integration.
• This technology holds potential for applications requiring precise pressure monitoring in confined or demanding environments.