Fabrication of a TEM sample of ion-irradiated material using focused ion beam microprocessing and low-energy Ar ion

Hyung-Ha Jin1, Chansun Shin, Junhyun Kwon

  • 1Nuclear Materials Research Division, Korea Atomic Energy Research Institute, 1045 Daedeok-daero, Yuseong-Gu, Daejeon, 305-353, Republic of Korea. hhajin2@kaeri.re.kr