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Related Concept Videos

Imaging Biological Samples with Optical Microscopy01:18

Imaging Biological Samples with Optical Microscopy

Optical microscopy uses optic principles to provide detailed images of samples. Antonie van Leeuwenhoek designed the first compound optical microscope in the 17th century to visualize blood cells, bacteria, and yeast cells. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes with enhanced magnification and resolution.
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Overview of Microscopy Techniques01:22

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Quantitative Optical Microscopy: Measurement of Cellular Biophysical Features with a Standard Optical Microscope
14:09

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Published on: April 7, 2014

Aberration effects in an optical measuring microscope.

C P Kirk

    Applied Optics
    |May 22, 2010
    PubMed
    Summary
    This summary is machine-generated.

    Microscope aberrations significantly impact critical dimension measurements of semiconductor geometries. These optical imperfections introduce substantial errors, affecting the accuracy and repeatability of measurements on integrated circuits.

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    Area of Science:

    • Optical microscopy
    • Metrology
    • Semiconductor manufacturing

    Background:

    • Accurate critical dimension (CD) measurement is vital for semiconductor fabrication.
    • Optical microscopes are commonly used for CD measurements.
    • Microscope aberrations can potentially affect measurement accuracy.

    Purpose of the Study:

    • To theoretically and practically investigate the impact of optical aberrations on CD measurements using optical microscopy.
    • To analyze the effects of primary aberrations on image profiles of narrow line objects relevant to integrated circuits.

    Main Methods:

    • Development of a diffraction theory model to simulate aberration effects.
    • Experimental examination of image intensity profiles from various microscope objectives.
    • Comparison of theoretical predictions with practical measurement data.

    Main Results:

    • Aberrations in microscope objectives were found to distort image profiles of narrow lines.
    • A diffraction theory model accurately predicted the effects of primary aberrations.
    • Experimental data confirmed the theoretical findings, showing good agreement between predicted and observed image profiles.

    Conclusions:

    • Aberrations present in many commercial microscope objectives introduce significant errors in semiconductor geometry measurements.
    • Understanding and mitigating aberration effects are crucial for reliable CD metrology in the semiconductor industry.