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Updated: Jun 12, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Scanning transmission X-ray microscopy with a fast framing pixel detector
A Menzel1, C M Kewish, P Kraft
1Paul Scherrer Institut, 5232 Villigen PSI, Switzerland. andreas.menzel@psi.ch
This study introduces sub-50 nm resolution hard X-ray Scanning Transmission X-ray Microscopy (STXM) using the fast PILATUS detector. This advancement enables advanced imaging modes like phase contrast and dark-field imaging.
Area of Science:
- Materials Science
- Physics
- Microscopy
Background:
- Scanning transmission X-ray microscopy (STXM) is a powerful imaging technique.
- Current detection schemes are often hindered by specialized detectors or slow readout.
- Achieving high-resolution STXM is crucial for materials analysis.
Purpose of the Study:
- To demonstrate sub-50 nm resolution STXM in the hard X-ray regime.
- To showcase the utility of the PILATUS detector for STXM.
- To enable advanced imaging modes in STXM.
Main Methods:
- Utilized a small X-ray probe raster scanned across a specimen.
- Employed the PILATUS fully pixelated fast framing detector.
- Operated the detector in single-photon counting mode for hard X-ray STXM.
Main Results:
- Achieved sub-50 nm resolution STXM.
- Demonstrated the effectiveness of the PILATUS detector for STXM.
- Successfully implemented phase contrast and dark-field imaging modes.
Conclusions:
- The PILATUS detector facilitates high-resolution STXM in the hard X-ray regime.
- This approach overcomes limitations of previous detection schemes.
- Enables new possibilities for advanced STXM imaging applications.
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