[A novel near-infrared spectra detection system based on MEMS grating light modulators]

Area of Science:

• Optoelectronics
• Spectroscopy
• Microelectromechanical Systems (MEMS)

Context:

• Traditional near-infrared (NIR) spectroscopy often relies on expensive detector arrays.
• Developing cost-effective and miniaturized NIR spectrometers is a significant challenge in analytical instrumentation.

Purpose:

• To propose and validate a novel NIR spectrum detection system utilizing MEMS grating light modulators (GLMs).
• To demonstrate a new spectral detection method combining GLMs with a single NIR detector, reducing system cost and complexity.

Summary:

• A novel optical structure and detection principle were designed, where voltages applied to GLM pixels selectively direct specific wavelengths to a single NIR detector.
• The GLM array was fabricated using surface micromachining, and the system's performance was evaluated.
• Experimental results show a spectrum range of 1320–1400 nm, resolving power <10 nm, wavelength accuracy within 1 nm, stability <0.5%, and response frequency of 5 kHz.

Impact:

• The developed system offers a feasible and cost-effective alternative for NIR spectral detection.
• Provides theoretical and experimental guidance for the design and fabrication of miniature NIR spectrometers based on GLMs.