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Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Transportable distance measurement system based on superheterodyne interferometry using two phase-locked
S Azouigui1, T Badr, J-P Wallerand
1Laboratoire Commun de Métrologie LNE-CNAM, 61 rue du Landy, Saint-Denis 93210, France.
The Review of Scientific Instruments
|June 3, 2010
Summary
A new transportable distance measurement system uses synthetic wavelength interferometry with lasers to achieve high precision. This system demonstrates accurate measurements within micrometers, offering a reliable solution for precise distance determination.
Area of Science:
- Optics and Photonics
- Metrology
- Laser Interferometry
Background:
- Traditional interferometry faces challenges with long distances and polarization.
- Synthetic wavelength interferometry offers a novel approach to overcome these limitations.
Purpose of the Study:
- To develop and demonstrate a transportable distance measurement system using synthetic wavelength interferometry.
- To achieve high-precision absolute distance measurements.
Main Methods:
- Utilized two frequency-doubled Nd:yttrium aluminum garnet lasers at 532 nm to create a synthetic wavelength of approximately 2.5 cm.
- Implemented a nonpolarizing interferometric system to mitigate polarization cross-talk.
- Employed superheterodyne detection for synthetic phase measurement and absolute distance determination.
Main Results:
- Demonstrated fringe interpolation capability of 2pi/5600.
- Achieved agreement in distance measurement at the 4 micrometer level compared to a 3-meter optical interferometric displacement bench.
Conclusions:
- The developed system provides a transportable and highly accurate solution for absolute distance measurement.
- Synthetic wavelength interferometry, combined with superheterodyne detection, offers significant advantages in precision and reliability.

