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Transmission Electron Microscopy

Transmission Electron Microscopy

In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400 keV in...

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Updated: Jun 12, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Solving the accelerator-condenser coupling problem in a nanosecond dynamic transmission electron microscope.

B W Reed¹, T LaGrange, R M Shuttlesworth

¹Lawrence Livermore National Laboratory, Livermore, California 94551, USA.

The Review of Scientific Instruments

|June 3, 2010

Summary

This summary is machine-generated.

A modified transmission electron microscope (TEM) achieves high-current, high-resolution imaging at speeds over six orders of magnitude faster than conventional methods. This breakthrough enables rapid, detailed analysis of material microstructures.

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Last Updated: Jun 12, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Fabrication and Operation of a Nano-Optical Conveyor Belt

Fabrication and Operation of a Nano-Optical Conveyor Belt

Published on: August 26, 2015

Area of Science:

Materials Science
Electron Microscopy
Physics

Background:

Conventional transmission electron microscopy (TEM) is limited by slow imaging speeds and lower current densities.
Achieving high-resolution imaging of dynamic microstructural changes requires faster acquisition rates and higher electron beam currents.

Purpose of the Study:

To present a novel modification to a transmission electron microscope (TEM) for ultra-fast, high-current imaging.
To enable real-space imaging of material microstructure with significantly reduced exposure times.

Main Methods:

Incorporation of a pulsed-laser-driven photocathode for high-current operation (>10 mA).
Addition of a weak magnetic lens to couple a high-current electron beam into the TEM condenser lens system.
Utilizing ray tracing and finite element simulations to model system performance.

Main Results:

Real-space imaging of material microstructure with ~10 nm resolution over several micrometer regions.
Achieved exposure times of 15 ns, over six orders of magnitude faster than typical video-rate TEM.
Demonstrated consistency between experimental performance and simulation models.

Conclusions:

The modified TEM system enables ultra-fast, high-resolution imaging of microstructures.
The modification facilitates very high electron current densities in micrometer-sized areas.
Potential applications include high-throughput imaging and analytical TEM, even in non-pulsed systems.