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Atomic Force Microscopy

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Updated: Jun 12, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

Published on: June 13, 2023

Cantilevered bimorph-based scanner for high speed atomic force microscopy with large scanning range.

Yusheng Zhou¹, Guangyi Shang, Wei Cai

¹Department of Applied Physics, Beihang University, Beijing 100191, People's Republic of China.

The Review of Scientific Instruments

|June 3, 2010

Summary

This study introduces a novel cantilevered bimorph scanner for high-speed atomic force microscope (AFM) imaging. This scanner achieves kilohertz line rates, enabling dynamic imaging of diverse samples with enhanced real-time data processing.

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Sub-nanometer Resolution Imaging with Amplitude-modulation Atomic Force Microscopy in Liquid

Sub-nanometer Resolution Imaging with Amplitude-modulation Atomic Force Microscopy in Liquid

Published on: December 20, 2016

Area of Science:

Materials Science
Nanotechnology
Physics

Background:

Atomic Force Microscopy (AFM) is crucial for nanoscale imaging.
Conventional AFM scanners face limitations in speed and real-time data processing.
Developing faster and more adaptable AFM systems is essential for observing dynamic processes.

Purpose of the Study:

To present a novel cantilevered bimorph-based resonance-mode scanner for high-speed AFM imaging.
To demonstrate the capability of real-time data processing and image calibration using the scanner's integrated piezolayer.
To showcase the system's versatility for observing samples with varying properties at high scan rates.

Main Methods:

A cantilevered bimorph scanner was designed, with one end fixed to a conventional tube scanner and the other holding the sample stage.
High-speed scanning was achieved by vibrating the bimorph at its resonant frequency using a sine wave voltage.
A second piezolayer on the bimorph provided simultaneous vibration amplitude and phase data for real-time processing.

Main Results:

The bimorph scanner enabled preset line scan rates from hundreds of hertz to several kilohertz by adjusting the free length.
AFM images of various samples, including a silicon grating at 1.5 kHz line rate (20 µm scan size), were successfully obtained.
Dynamic imaging capabilities were demonstrated by scanning a moving polished aluminum foil surface.

Conclusions:

The developed resonance-mode bimorph scanner significantly enhances AFM imaging speed.
The integrated sensor provides real-time feedback for improved data processing and calibration.
This technology offers a promising platform for observing dynamic nanoscale phenomena and diverse material properties.