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Updated: Jun 12, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
High resolution digital holographic synthetic aperture applied to deformation measurement and extended depth of field
1Optical Engineering Laboratory, School of Engineering, University of Warwick, CV4 7AL, Coventry, UK. daniel.claus@gmx.net
Abstract:
This paper discusses the potential of the synthetic-aperture method in digital holography to increase the resolution, to perform high accuracy deformation measurement, and to obtain a three-dimensional topology map. The synthetic aperture method is realized by moving the camera with a motorized x-y stage. In this way a greater sensor area can be obtained resulting in a larger numerical aperture (NA). A larger NA enables a more detailed reconstruction combined with a smaller depth of field. The depth of field can be increased by applying the extended depth of field method, which yields an in-focus reconstruction of all longitudinal object regions. Moreover, a topology map of the object can be obtained.

