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Laser-beam writing system for optical integrated circuits.

M Haruna, S Yoshida, H Toda

    Applied Optics
    |June 5, 2010
    PubMed
    Summary
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    A new laser-beam writing system enables automated fabrication of optical integrated circuits (optical ICs) with precise waveguide patterns. This technology facilitates the creation of complex, large-area optical circuits on lithium niobate substrates.

    Area of Science:

    • Photonics and Optoelectronics
    • Materials Science
    • Integrated Optics

    Background:

    • Optical integrated circuits (optical ICs) are crucial for advanced optical systems.
    • Precise fabrication of waveguide patterns is essential for high-performance optical ICs.
    • Existing methods may lack the precision or automation required for complex designs.

    Purpose of the Study:

    • To develop and characterize a computer-controlled laser-beam writing system for fabricating optical ICs.
    • To demonstrate the system's capability in creating various waveguide patterns with high precision.
    • To showcase the potential for large-area optical ICs using this technology.

    Main Methods:

    • Development of a computer-controlled laser-beam writing system.
    • Fabrication of waveguide patterns (directional couplers, Y-junctions, crossed, S-shaped) on photoresist-coated LiNbO(3) substrates.

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  • Characterization of waveguide dimensions and edge roughness.

    • Main Results:

    • The system successfully fabricated waveguide patterns with widths of 3-4 micrometers.
    • Achieved edge roughness of 0.2 micrometers for the fabricated waveguides.
    • Demonstrated the delineation of optical ICs over 50-mm lengths by combining waveguide patterns.

    Conclusions:

    • The developed laser-beam writing system offers precise and automated fabrication of optical ICs.
    • The system is suitable for creating complex and large-area integrated optical devices.
    • An integrated-optic fiber laser Doppler velocimeter was successfully demonstrated as an application example.