Derivation of surface macroroughness parameters of a random rough surface from an optical interferometric measurement
Applied Optics
|June 5, 2010
Abstract:
A new technique for the measurement of surface roughness based on the intensity fluctuations of laser light backscattered from a moving surface has been introduced. Using a statistical model describing surface macroroughness, the possibility of inversion of optically measured data to geometrical surface profile parameters is investigated.


