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Updated: Jun 12, 2026

09:46
Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography
D Bruce Burckel1, Joel R Wendt, Gregory A Ten Eyck
1Sandia National Laboratories, Albuquerque, NM 87185, USA. dbburck@sandia.gov
Advanced Materials (Deerfield Beach, Fla.)
|June 10, 2010
Abstract
No abstract available in PubMed .

