Second-order systematic errors in Mueller matrix dual rotating compensator ellipsometry

Area of Science:

• Optical Physics
• Materials Science
• Metrology

Background:

• Mueller matrix ellipsometry is a powerful technique for characterizing materials.
• Dual rotating compensator configurations offer advantages but are susceptible to systematic errors.
• Understanding and mitigating these errors is crucial for accurate measurements.

Purpose of the Study:

• To derive and analyze second-order systematic errors in dual rotating compensator Mueller matrix ellipsometry.
• To investigate the impact of azimuthal inaccuracies of optical components on measurements.
• To develop calibration procedures for improved accuracy.

Main Methods:

• Derivation of explicit second-order Mueller matrix errors from a general formalism.
• Analysis of errors caused by azimuthal inaccuracy of optical components.
• Development of calibration steps for polarizers and analyzers.
• Numerical simulations and experimental validation.

Main Results:

• Identified specific second-order systematic errors in Mueller matrix coefficients.
• Demonstrated that four-zone or two-zone averaging effectively cancels compensator-related errors.
• Showed that other systematic errors can only be canceled for specific Mueller matrix coefficients.
• Developed and validated a calibration procedure for polarizers and analyzers.

Conclusions:

• Second-order systematic errors in dual rotating compensator Mueller matrix ellipsometry can be systematically analyzed.
• Zone averaging methods are effective for specific error sources.
• Component calibration is essential for minimizing residual systematic errors.
• The presented methods improve the accuracy and reliability of Mueller matrix measurements.