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Ellipsometric monitor for process control.

Y Hayashi, A Itoh

|June 16, 2010

Summary

This study introduces an automated process monitor using ellipsometry. It features simple calibration and alignment, correcting errors for accurate measurements in real-time industrial applications.

Area of Science:

Materials Science
Optical Engineering
Process Monitoring

Background:

Ellipsometry is a powerful optical technique for thin film characterization.
Accurate measurements require precise optical alignment and calibration.
Industrial process monitoring demands robust and automated systems.

Purpose of the Study:

To develop an automated process monitor utilizing ellipsometry.
To implement simple and effective automatic azimuth calibration.
To integrate an optical alignment mechanism with automatic correction.

Main Methods:

Ellipsometry-based process monitoring.
Automatic azimuth angle error determination and correction.
Manual and automatic optical alignment procedures.

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Main Results:

The developed system incorporates simple automatic calibration and alignment.
Azimuth angle errors are determined and corrected, improving psi and Delta accuracy.
Performance tests confirmed the effectiveness of the correction methods, despite approximations.

Conclusions:

The automated ellipsometry process monitor is effective for real-time measurements.
The integrated calibration and alignment systems offer practical solutions for industrial use.
The approximations used in the correction methods do not significantly impede performance.