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Test of strip coating materials for protecting optics
Applied Optics
|June 16, 2010
Summary
All tested strip coating materials left carbon residue on silicon and glass surfaces. However, one material also removed existing carbon contamination from glass, indicating variable effectiveness in surface cleaning.
Area of Science:
- Materials Science
- Surface Chemistry
Background:
- Surface preparation is critical in semiconductor and glass industries.
- Effective removal of coating materials and contaminants is essential for subsequent processing.
Purpose of the Study:
- To evaluate the residue left by four strip coating materials on silicon and glass surfaces.
- To assess the impact of these materials on existing surface contamination.
Main Methods:
- Total integrated scattering measurements were used to analyze silicon wafers.
- X-ray photoelectron spectroscopy (XPS) examined elemental composition and line shapes on surfaces before and after coating and stripping.
Main Results:
- All four strip coating materials resulted in residual carbon contamination on both silicon and glass surfaces.
- One specific coating material demonstrated the ability to remove pre-existing carbon contamination from a glass surface.
- The thickness of residual layers was estimated based on carbon abundance.
Conclusions:
- Standard strip coating materials leave carbon residues, impacting surface cleanliness.
- The effectiveness of strip coatings varies, with potential for removing existing contaminants.
- Further studies are needed to assess performance on heavily contaminated surfaces.
