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Related Concept Videos

UV–Vis Spectrometers01:14

UV–Vis Spectrometers

The absorbance of UV and visible (UV–visible) radiations is measured using a UV–visible spectrophotometer. Deuterium lamps, which emit UV radiation, and tungsten lamps, which produce radiation in the visible region, are used as light sources in UV–visible spectrophotometers. A monochromator or prism is used for diffraction grating, i.e., to split the incoming radiation into different wavelengths. A system of slits is used to focus the desired wavelength on the sample cell. Samples for...
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Absorption of Radiation

The rate of heat transfer by emitted radiation is described by the Stefan-Boltzmann law of radiation:

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Related Experiment Video

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Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
07:17

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry

Published on: August 1, 2017

Multipass absorption cell designed for high temperature UHV operation.

R D Schaeffer, J C Sproul, J O'Connell

    Applied Optics
    |June 16, 2010
    PubMed
    Summary
    This summary is machine-generated.

    This study presents a tunable diode laser system for precise gas analysis. It achieves low detection limits for water (below 10 ppb) and carbon dioxide (below 1 ppb) in nitrogen semiconductor gas.

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    Area of Science:

    • Analytical Chemistry
    • Spectroscopy
    • Laser Technology

    Background:

    • Accurate measurement of trace gases like water and carbon dioxide is crucial in semiconductor manufacturing.
    • Existing methods may lack the sensitivity or stability required for ppb-level detection.

    Purpose of the Study:

    • To design and evaluate a tunable diode laser system for high-sensitivity gas concentration determination.
    • To achieve detection limits below 10 parts per billion (ppb) for water and below 1 ppb for carbon dioxide in nitrogen gas.

    Main Methods:

    • Utilized a tunable lead-salt (Pb-salt) diode laser spectrometer.
    • Employed a multipass absorption cell for enhanced sensitivity.
    • Frequency locked the laser to a molecular absorption line using a first derivative error signal.
    • Monitored sample concentrations in the second derivative mode.
    • Implemented automatic compensation for laser intensity fluctuations.
    • Used a flowing gas method to mitigate adsorption/desorption effects.

    Main Results:

    • Demonstrated the capability to determine water concentration below 10 ppb.
    • Achieved determination of carbon dioxide concentration below 1 ppb in nitrogen semiconductor gas.
    • The system showed automatic compensation for laser intensity fluctuations, enhancing stability.

    Conclusions:

    • The developed tunable diode laser system with a multipass absorption cell provides high sensitivity for trace gas analysis.
    • The system is suitable for monitoring low concentrations of water and carbon dioxide in semiconductor process gases.
    • The design addresses challenges like laser instability and wall adsorption for reliable measurements.