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Updated: Jun 12, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Abstract:
Holographic microinterferometer with the noise suppression is presented. The noise suppression method proposed consists of synchronous deflection of both beams. The method is applied on every step of the holographic process as well as during holographic interferometric investigations. A significant increase in image quality was achieved in conjunction with a parallel increase in resolution. It has been experimentally demonstrated, that the applied method can suppress the coherent noise by at least one order of magnitude, depending on the initial noise level. For the case of a high initial noise level the improvement is greater than 2 orders of magnitude.
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