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Optical scattering from oxidized metals. 2: Model verification for oxidized copper.

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|June 18, 2010

Summary

This study presents a model for diffuse reflectance spectra of oxidized metals, successfully applied to copper films. The model accurately determines interface roughness, crucial for understanding optical properties of oxidized metal surfaces.

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Area of Science:

Materials Science
Surface Science
Optical Physics

Background:

Oxidized metal films are crucial in various applications.
Understanding the optical properties requires knowledge of surface and interface characteristics.
Diffuse reflectance spectroscopy is a key technique for characterizing these films.

Purpose of the Study:

To apply and validate a model for calculating diffuse reflectance spectra of oxidized metals.
To independently determine the root-mean-square (rms) roughness of air-oxide and oxide-metal interfaces.
To compare model-derived roughness values with experimental measurements.

Main Methods:

Application of a diffuse reflectance spectra calculation model to thermally oxidized copper films.
Fitting the model to experimental spectra to extract interface roughness parameters.
Comparison of model-derived rms roughness with stylus profiling and total integrated scattering measurements.

Main Results:

The model accurately reproduces the spectral structure of experimental diffuse reflectance data.
Air-oxide interface roughness dominates scattering at shorter wavelengths, while oxide-metal roughness dominates at longer wavelengths.
Independently determined rms roughness values show good agreement across different measurement techniques.

Conclusions:

The developed model is effective for analyzing diffuse reflectance spectra of oxidized metals.
The model allows for independent determination of air-oxide and oxide-metal interface roughness.
The findings validate the model's applicability and provide insights into scattering mechanisms in oxidized metal films.