Development of a spatial light modulator: a randomly addressed liquid-crystal-over-nMOS array

The construction of a 50- x 50-pixel spatial light modulator based on an active silicon backplane and using the hybrid field effect in nematic liquid crystals as the light modulating process is described. The design and electrical evaluation of the pixel array, which is fabricated in 1.5-microm nMOS and has an individual memory cell within each pixel, are discussed. The performances of a 16 x 16 prototype SLM and the new 50- x 50-pixel device are compared to provide an indication of progress toward high performance spatial light modulators with onboard pixel memory.