Wavelength-independent integrated focus sensor using a reflection twin micro-Fresnel lens

A compact focus sensor constructed with thin film components such as a reflection twin micro-Fresnel lens and a photodetector is proposed. This sensor has a folded optical path and is insensitive to wavelength shift. Theoretical analysis indicates that the optical performance of reflection Fresnel lenses can be improved in comparison with a conventional transmission micro-Fresnel lens. The reflection twin Fresnel lens was fabricated using electron-beam lithography and exhibited diffraction-limited focusing performance with high (71%) efficiency. It was demonstrated that the focus sensor had excellent spot displacement characteristics in agreement with theoretical results, and a focus error signal was detected. This focus sensor could be useful for the optical head of an optical disk system.