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Integrated optic pressure sensor on silicon substrate.

M Ohkawa, M Izutsu, T Sueta

    Applied Optics
    |June 18, 2010
    PubMed
    Summary
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    A new integrated optic pressure sensor uses a Mach-Zehnder interferometer to detect pressure via diaphragm deformation. This silicon-based device offers tunable pressure ranges and sensitivity, demonstrating a halfwave pressure of 0.8 x 10(5) Pa.

    Area of Science:

    • Photonics and Sensor Technology
    • Integrated Optics
    • Silicon Microfabrication

    Background:

    • Traditional pressure sensors face limitations in sensitivity and integration.
    • Optical sensing offers advantages in harsh environments and electromagnetic interference immunity.
    • Integrated optics provide miniaturization and high performance for sensor applications.

    Purpose of the Study:

    • To develop a novel integrated optic pressure sensor.
    • To investigate the Mach-Zehnder interferometer structure for pressure sensing.
    • To demonstrate tunable pressure ranges and sensitivity through diaphragm design.

    Main Methods:

    • Fabrication of a Mach-Zehnder interferometer using glass waveguides on a silicon substrate.
    • Utilizing anisotropic etching for diaphragm creation.

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  • Characterization of sensor performance at 633 nm wavelength.

    • Main Results:

    • Successful construction of an integrated optic pressure sensor.
    • Demonstration of pressure sensing through diaphragm deformation.
    • Measured halfwave pressure of 0.8 x 10(5) Pa.
    • Achieved an extinction ratio of 10 dB.

    Conclusions:

    • The novel integrated optic pressure sensor based on Mach-Zehnder interferometry is feasible.
    • Diaphragm design is critical for tuning the sensor's pressure range and sensitivity.
    • The fabricated device shows promising performance for optical pressure sensing applications.