Two-dimensional metallic tungsten nanowire network fabricated by electron-beam-induced deposition

One-dimensional tungsten nanowires and two-dimensional tungsten nanowire networks were fabricated on a tungsten substrate by using electron-beam-induced deposition (EBID) without precursor injection. The as-prepared tungsten nanostructures were studied using a combination of energy-dispersive x-ray spectroscopy and selected area electron diffraction. It was revealed that the tungsten nanostructures were composed of pure metallic tungsten. The WO(3) oxide formed in the chemical preparation of tungsten foils was probably the source of tungsten for the fabrication of tungsten nanostructures by EBID.