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EUV efficiency of a 6000-grooves mm(-1) diffraction grating

M Hurwitz, S Bowyer, J Edelstein

    Applied Optics
    |June 22, 2010
    PubMed

    Abstract:

    We present measurements of the efficiency and large-angle scattering of a very high line density, mechanically ruled,planar, uniform line-space diffraction grating at extreme ultraviolet wavelengths.

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