Updated: Jun 12, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Jingjing Liu1, Jacob K Notbohm, Robert W Carpick
1Materials Science Program, Department of Mechanical Engineering, University of Wisconsin, Madison, Wisconsin 53706, USA.
This study introduces a new method to quantify nanoscale tip wear in atomic force microscopy (AFM) probes. The technique reveals diverse failure mechanisms in silicon and silicon nitride tips, crucial for nanomanufacturing applications.
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