High numerical aperture planar microlens with swelled structure

The planar microlens is a 2-D integrated microlens fabricated by the selective ion exchange technique. This paper demonstrates a new class of planar microlens which has a high numerical aperture. The new planar microlens uses a swelling structure and index distribution which comes from replacing ions with different ion volumes. Lens diameters from 10 to 400 microm can be fabricated. A numerical aperture larger than 0.5 is achieved when the lens diameter is smaller than 100 microm. Use of this microlens in light coupling between an LD and a single-mode fiber is also evaluated.