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Updated: Jun 12, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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Optical constants of sputtered WO(3).

D Green

    Applied Optics
    |June 26, 2010
    PubMed
    Summary

    Optical constants for tungsten oxide films were determined using a bivariate optimization method. This research provides essential optical property data for materials scientists and engineers.

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    Area of Science:

    • Materials Science
    • Optics
    • Thin Film Technology

    Background:

    • Accurate optical constants are crucial for designing optical coatings and devices.
    • Tungsten oxide (WO3) is a promising material for electrochromic and photonic applications.
    • Previous optical characterization of tungsten oxide has limitations in spectral range or accuracy.

    Purpose of the Study:

    • To determine the optical constants (refractive index and extinction coefficient) of reactively sputtered tungsten oxide.
    • To establish a reliable method for optical characterization of thin films.
    • To provide accurate optical data for the 0.3–0.8 micrometer wavelength range.

    Main Methods:

    • Reactive sputtering of tungsten oxide thin films.
    • Spectroscopic ellipsometry for optical measurement.
    • Bivariate optimization procedure for data analysis.

    Main Results:

    • Precise optical constants for tungsten oxide were obtained in the visible spectrum (0.3–0.8 µm).
    • The bivariate optimization successfully resolved the optical properties.
    • The determined optical constants show potential for advanced optical applications.

    Conclusions:

    • The study successfully determined the optical constants of tungsten oxide.
    • The bivariate optimization procedure is effective for thin film optical characterization.
    • The obtained data will aid in the development of tungsten oxide-based optical devices.

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